Drive components for vacuum technology
Couplings and other drive components for vacuum technology must fulfil special requirements in terms of material selection depending on the vacuum level. Materials with a low desorption rate, high mechanical strength, high temperature and corrosion resistance as well as clean and smooth surfaces are to be favoured when selecting materials for suitable drive components.
Drive of coating rollers
Orbit Antriebstechnik supplies a complete programme tailored to these requirements. Disc couplings from the CD coupling series made of stainless steel 1.4301 ensure the precise drive of coating rollers in innovative coating systems under vacuum conditions. Bellows couplings from the Belflex Thermbago series with stainless steel bellows, stainless steel hubs, a welded connection of these and additionally equipped with special vacuum screws solve drive technology tasks in the vacuum range.
Stainless steel and minimised outgassing plastics in semiconductor technology
In certain applications in semiconductor technology and sensor production, the processes take place under vacuum conditions. Oldham couplings are equipped with stainless steel hubs for this purpose. The technical material PEEK (polyetheretherketone) is the material of choice for the transfer disc in these applications, as it has minimal outgassing properties and therefore does not contaminate products and machine parts. The stainless steel hubs are also subjected to an electropolishing process to reduce their surface roughness - essential for vacuum applications in order to minimise the amount of absorbates that may adhere.
Optics, architectural glass, photovoltaic systems
Coating processes for optics, architectural glass, solar and photovoltaic systems also take place under vacuum conditions. The Belflex Thermbago stainless steel bellows couplings and the Beamflex stainless steel spiral couplings reliably fulfil their task here. The Diskflex stainless steel disc coupling series is also used for these tasks. In a double-cardanic design, they offer a high universal displacement capacity combined with high torsional rigidity. Compact versions of these torsionally rigid stainless steel disc couplings are available for axially tight installation situations. Orbit Antriebstechnik's clamping ring programme offers one-piece and radially mountable Clampmax split clamping rings in a wide range of stainless steel grades for fixing components in vacuum technology systems. The Beamflex beam couplings from the stainless steel series or the backlash-free Sliflex spring bar couplings, also made of stainless steel, are used in semiconductor production in vacuum environments.
